Plasma, Space Propulsion Laboratory

プラズマ・宇宙推進研究室

News

お知らせ

Jan. 5, 2019

解説記事が公開されました。
鷹尾ら, 日本航空宇宙学会誌 2019年 67巻 1号 p. 5-11.

Nov. 13-15, 2018

40th International Symposium on Dry Process @ Nagoya University で発表を行いました。
Naoki Inoue, Masayoshi Nagao, Katsuhisa Murakami, Sommawan Khumpuang, Shiro Hara, and Yoshinori Takao, "Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process", D-2.

Nov. 5-9, 2018

71st GEC @ Oregon Convention Center で発表を行いました。
Yoshinori Takao, Kengo Nakamura, Yosuke Sato, and Hiroyuki Koizumi, "Water ion thrusters using micro ECR discharges for CubeSat projects," SF2.00003
Yoshinori Takao, Kazuki Takase, Sora Yoshikawa, and Kazunori Takahashi, "Investigation of neutral depletion and propulsion performance in electrodeless RF plasma thrusters," TF4.00009

Nov. 1, 2018

Future Technologies フォトコンテスト ~アートのようなマイクロ・ナノ テクノロジ~ において 最優秀賞を受賞しました。

Oct. 24-26, 2018

第62回宇宙科学技術連合講演会 @久留米シティプラザ で発表を行いました。
また,M1の佐藤陽亮が優秀発表賞を受賞しました。
中村研悟, 小泉宏之, 鷹尾祥典, 「小型マイクロ波放電式水イオンスラスタの放電特性に与える負イオンの影響」, 3E07
菅原丈晴, 高橋和貴, 鷹尾祥典, 安藤晃, 「ヘリコンスラスタ中の局所プラズマ運動量ベクトル計測法の開発」, 3G14
高橋和貴, Charles Christine, Boswell Rod, 鷹尾祥典, 菅原丈晴, 齋藤太地, 高瀬一樹, 安藤晃, 「ヘリコンスラスタ中のプラズマ物理現象とRFシステム開発」, 3N07
鷹尾祥典, 高瀬一樹, 吉川空, 高橋和貴, 「粒子計算を用いた無電極RFプラズマスラスタの推力要素解析」, 3N08
佐藤陽亮, 小泉宏之, 鷹尾祥典, 「小型マイクロ波放電式中和器内部を対象とした電子輸送過程の3次元粒子計算」, P06
井上直樹, 長尾昌善, 村上勝久, クンプアン ソマワン, 原史朗, 鷹尾祥典, 「高密度エミッタアレイを有するエレクトロスプレースラスタのイオン引き出し実験」, P07
古家遼, 村上勝久, 長尾昌善, 鷹尾祥典, 「平面型グラフェン電子源の放出効率向上と大電流化に向けた取り組み」, P08
江本一磨, 神田大樹, 月崎竜童, 鷹尾祥典, 西山和孝, 國中均, 「火星磁場異常を利用した宇宙放射線遮蔽の実証」, P35
(上記順序はプログラムに準拠)

Oct. 15, 2018

Published online. The research was conducted in collaboration with Ando and Takahashi Lab at Tohoku University.
論文が公開されました。 本研究は東北大学安藤・高橋研究室との共同研究成果です。
K. Takahashi et al., AIP Adv. 8, 105117 (2018)

Oct. 11, 2018

Published online. 論文が公開されました。
T. Hatsuse et al., J. Appl. Phys. 124, 143301 (2018)

Sep. 22, 2018

日本宇宙生物科学会第32回大会 @東北大学 片平キャンパス で発表を行いました。
江本一磨, 鷹尾祥典, 國中均, 「火星の磁場を利用した宇宙放射線防御の数値計算」, O1-7

Aug. 30-31, 2018

イノベーション・ジャパン2018~大学見本市&ビジネスマッチング~「エレクトロスプレー型2Dアレイ高電流密度イオン源」を出展しました。

Jul. 17, 2018

Published online. The research was conducted in collaboration with Ando and Takahashi Lab at Tohoku University.
論文が公開されました。 本研究は東北大学安藤・高橋研究室との共同研究成果です。
K. Takahashi et al., Appl. Phys. Lett. 113, 034101 (2018)

Jul. 9-13, 2018

31st International Vacuum Nanoelectronics Conference @京都 で発表を行いました。
Naoki Inoue, Masayoshi Nagao, Katsuhisa Murakami, Sommawan Khumpuang, Shiro Hara, and Yoshinori Takao, "Fabrication of Electrospray Thrusters with a High-Density Emitter Array Utilizing Minimal-Fab System", P2-70, O4-4
Ryo Furuya, Katsuhisa Murakami, Masayoshi Nagao, and Yoshinori Takao, "Improvement of Electron Emission Efficiency of Graphene-Oxide-Semiconductor Planar-Type Electron Sources for Nanosatellite Neutralizers", P1-43
また、M1 古家遼 がStudent Presentation Awardを受賞しました。本研究は産総研との共同研究成果です。

Jul. 9-11, 2018

AIAA Propulsion and Energy Forum @Duke Energy Convention Center で発表を行いました。
Kengo Nakamura, Hiroyuki Koizumi, and Yoshinori Takao, "Investigation of Ion Species in Water Plasma for Miniature Microwave Discharge Ion Thrusters", EP-11, AIAA-2018-4650

Jul. 4, 2018

Published online. The research was conducted in collaboration with Koizumi Lab at The University of Tokyo.
M2 中村 筆頭著者の論文が公開されました。 本研究は東京大学小泉研究室との共同研究成果です。
K. Nakamura et al., Trans. Japan Soc. Aero. Space Sci. 61, 152 (2018)

安全工学シンポジウム2018 @日本学術会議 で発表を行いました。
鷹尾祥典, 土屋智由, 長尾昌善, 村上勝久, 「超小型人工衛星に搭載可能なマイクロ電気推進機」, OS-3-5

May 25, 2018

Published online. 論文が公開されました。
N. Nakazaki et al., AIP Adv. 8, 055027 (2018)

Apr. 28, 2018

Published online. The research was conducted in collaboration with Prof. Kuninaka of ISAS/JAXA.
M2 江本 筆頭著者の論文が公開されました。 本研究はJAXA宇宙科学研究所の國中均教授との共同研究成果です。
K. Emoto et al., Biol. Sci. Space 32, 1 (2018)

Apr. 19-20, 2018

第49期定時社員総会および年会講演会 @東京大学 生産技術研究所 で発表を行いました。
佐藤陽亮, 小泉宏之, 鷹尾祥典, 「電子引き出し効率向上に向けた小型マイクロ波放電式中和器の数値解析」, JSASS-2018-1033

Apr. 6, 2018

博士課程前期1年1名,学部4年生4名が新たに研究室メンバーに加わり、教員1名・学生11名の研究室になりました。

Mar. 23, 2018

学部生4名,大学院生1名が卒業しました。
また,以下の1名が学生賞を受賞しました。
高瀬一樹, 「2017年度横浜国立大学大学院 優秀学生表彰」, 「2017年度横浜国立大学大学院工学府 優秀学生表彰」

Mar. 17-20, 2018

応用物理学会 春季学術講演会 @早稲田大学 西早稲田キャンパス で発表を行いました。
村上勝久, 宮路丈司, 古家遼, 安達学, 飯島拓也, 長尾昌善, 根本善弘, 竹口雅樹, 鷹尾祥典, 山田洋一, 佐々木正洋, 根尾陽一郎, 三村秀典, 「低真空・低電圧で動作するグラフェンを用いた高効率平面型電子源」, 19p-C102-3
鷹尾祥典, 井上直樹, 江本一磨, 山田涼平, 土屋智由, 長尾昌善, 村上勝久, 「電子源技術を使った超小型宇宙推進機の開発」, 19p-C102-5
古家遼, 村上勝久, 長尾昌善, 鷹尾祥典, 「超小型イオンエンジン用高効率平面型グラフェン電子源の開発」, 20a-B303-5

Mar. 14-16, 2018

AJCPP 2018 @Xiamen City Hotel で発表を行いました。
Kengo Nakamura, Hiroyuki Koizumi, and Yoshinori Takao, "Improvement of Plasma Distribution by Propellant Injection Position in Miniature Microwave Discharge Water Ion Thruster Using Water as Propellant", AJCPP2018-018

Mar. 4, 2018

Published online. The research was conducted in collaboration with Prof. Takahashi of Tohoku University.
M2 高瀬 筆頭著者の論文が公開されました。 本研究は東北大学の高橋和貴准教授との共同研究成果です。
K. Takase et al., Trans. JSASS Aerospace Tech. Japan 16, 105 (2018)
Published online. The research was conducted in collaboration with Prof. Tsuchiya of Kyoto University.
M1 江本 筆頭著者の論文が公開されました。 本研究は京都大学の土屋智由准教授との共同研究成果です。
K. Emoto et al., Trans. JSASS Aerospace Tech. Japan 16, 110 (2018)

Mar. 2, 2018

第15回真空ナノエレクトロニクスシンポジウム, @アクトシティ浜松 で発表を行いました。
鷹尾祥典, 井上直樹, 江本一磨, 山田涼平, 土屋智由, 長尾昌善, 村上勝久, 「高実装密度イオン源の開発と超小型宇宙推進機への応用」
村上勝久, 飯島拓哉, 宮路丈司, 古家遼, 長尾昌善, 根本善弘, 竹口雅樹, 鷹尾祥典, 山田洋一, 佐々木正洋, 根尾陽一郎, 三村秀典, 「絶縁基板上へのグラフェン直接合成とグラフェン/酸化膜/Si積層構造からの高効率電子放出」

Feb. 23, 2018

仙台プラズマフォーラム『プラズマ流中マルチスケール構造形成による新規反応場に関する研究会』, @東北大学 で発表を行いました。
鷹尾祥典, 「エレクトロスプレー現象を利用した高電流密度イオン源の開発と超小型宇宙推進機への応用」

Feb. 6, 2018

Published online. The research was conducted in collaboration with Prof. Takahashi of Tohoku University.
M2 高瀬 筆頭著者の論文が公開されました。 本研究は東北大学の高橋和貴准教授との共同研究成果です。
K. Takase et al., Phys. Plasmas 25, 023507 (2018)

Jan. 22, 2018

Published online. The research was conducted in collaboration with Prof. Nakano of Tokyo Metropolitan College of Industrial Technology and Koizumi Lab at The University of Tokyo.
論文が公開されました。 本研究は都立産業技術高専の中野正勝准教授と 東京大学小泉研究室との共同研究成果です。
M. Nakano et al., Phys. Plasmas 25, 013524 (2018)

Jan. 18-19, 2018

平成29年度 宇宙輸送シンポジウム @宇宙科学研究所 で発表を行いました。
山田涼平, 鷹尾祥典, 「分子動力学計算によるエレクトロスプレースラスタの液滴分裂過程の解析」, STEP-2017-002
中村研悟, 小泉宏之, 鷹尾祥典, 「小型マイクロ波放電式水イオンスラスタにおける中性粒子流入を考慮した数値解析」, STEP-2017-006
江本一磨, 鷹尾祥典, 國中均, 「火星磁場異常を利用した宇宙放射線遮蔽の初期検討」, STEP-2017-021
佐藤陽亮, 小泉宏之, 鷹尾祥典, 「小型マイクロ波放電式中和器の電子引き出し効率向上を目指した3次元粒子計算」, STEP-2017-052
古家遼, 村上勝久, 長尾昌善, 鷹尾祥典, 「高放出効率を目指した平面型グラフェン電子源の試作」, STEP-2017-054
高瀬一樹, 高橋和貴, 鷹尾祥典, 「無電極スラスタにおける中性粒子分布変化がもたらす推力要素への影響」, STEP-2017-088

Jun. 1, 2015

学生ブログを開設しました。
学生ブログ

Apr. 1, 2014

4年生2名とともに研究室が発足しました。

Research

研究テーマ

Low costs and short development periods have enabled even small companies and universities to launch and operate microspacecraft (Nanosatellites). However, almost all microspacecraft do not have any propulsion systems. If a microspacecraft had microthrusters mounted on it, the microspacecraft could be controlled more effectively and we could deorbit it safely. The YNU Plasma, Space Propulsion Laboratory is doing research on microthrusters numerically and experimentally.

宇宙開発のハードルを大幅に引き下げた超小型衛星・宇宙機。 今や衛星開発は、一部の大企業や政府機関だけでなく、中小企業や大学でも可能な時代になっています。 しかし、大部分の超小型衛星は推進機(スラスタ)を搭載しておらず、衛星自らが自由に軌道を選ぶことができません。 当研究室(2014年4月発足)では超小型衛星の自由度を高めるために、主にプラズマを使ったマイクロスラスタの研究開発を行っています。 また、プラズマには様々なアプリケーションがあり、半導体/MEMSプロセス関係の研究も行っています。

Micro RF ion thruster/超小型高周波放電式イオンスラスタ

micro RF ion thruster

We have been investigating the mechanisms of RF plasma generation and ion beam extraction for one of the world’s smallest RF ion thrusters, 1 cm in diameter and length, using 2D PIC-MCC, external RF circuit analysis, plasma diagnostics, and beam current measurements.

高周波放電を用いた世界最小クラスのイオンスラスタにおいて、放電の高効率化やイオンビーム引き出しの最適化を数値解析と実験の両面から行っています。 高周波放電は電源、整合回路、プラズマが密接に関わっており、インピーダンス解析が重要になります。 また、粒子モデル計算によるプラズマ生成およびイオンビーム引き出し機構の解析が性能向上に不可欠です。 数値解析結果は実験結果との比較により妥当性を検証しています。

Miniature microwave ion thruster/超小型マイクロ波放電式イオンスラスタ

ne destribution

A miniature ion propulsion system (MIPS) was developed by the University of Tokyo, where electron cyclotron resonance (ECR) discharges are employed for its ion source and neutralizer. The MIPS was installed on a 50 kg-class spacecraft, HODOYOSHI-4, which was launched on June 19, 2014, and was operated successfully in space on October 28. 3D PIC-MCC simulations are carried out for clear guidelines for optimum designs. This work is being conducted in collaboration with the University of Tokyo.

小惑星探査機「はやぶさ」に搭載されたメインエンジンと同じマイクロ波放電式イオンスラスタおよび中和器を対象にプラズマ源や電子引き出し機構の解析を行っています。 本研究は東京大学の小泉先生との共同研究です。 東京大学で実験を、当研究室で粒子モデルを用いた3次元数値解析を行っています。 本スラスタは 「ほどよし4号機」や 「PROCYON」にて宇宙での運用実証がされています。

Electrospray microthruster/エレクトロスプレー式マイクロスラスタ

micro capillary arrays

Further miniaturization of microthrusters could be realized by using electrospray technique, which might enable us to mount thrusters on 1U CubeSats. Microfabricated emitter arrays extract a conductive liquid propellant, which could drastically reduce weight and volume of the propellant feed system. A new structure of emitter arrays is now under development. This work is being conducted in collaboration with Kyoto University.

3次元MEMS加工によるキャピラリ電極構造をアレイ状に製作し、イオン液体を電界放出効果により引き出すマイクロスラスタです。 毛細管現象を利用することで推進剤供給機構の簡素化が図れ、推進システム全体の大幅な小型・軽量・高効率化が期待できます。 その結果、より小型の衛星・宇宙機にも搭載可能になります。 本研究は京都大学の土屋先生との共同研究(上図は土屋先生ご提供)で、 製作には京都大学ナノテクノロジーハブ拠点を利用予定です。

Electrothermal microthruster/電熱加速型マイクロスラスタ

microplasma thruster

A miniature electrothermal thruster using azimuthally symmetric microwave-excited plasmas was developed. The propellant gas of Ar at pressures of 10–100 kPa was discharged by surface waves at below 10 W. We conducted 2D FDTD analysis and two-temperature fluid simulations of plasma generation and micronozzle flows. OES and thrust measurements were also conducted.

Arガスにマイクロ波電力を投入してプラズマを生成し、その熱をマイクロノズルを用いて超音速ジェットに加速するマイクロスラスタです。 プラズマ源のマイクロ波電磁場構造やマイクロノズル流れの数値解析とともに分光測定や推力測定等の実験的研究を行ってきました。

Magnetic nozzle acceleration/磁気ノズル加速機構

microplasma thruster with applied magnetic field

Applied magnetic field could enhance ion axial velocity without loss of the plasma toward physical nozzle walls. 2D PIC-MCC simulations and experiment are conducted.

マイクロノズルの代わりに磁場を印加することで磁気ノズルを形成し、ノズル壁面での損失を抑えたマイクロスラスタです。 数値計算による粒子加速機構の解析や推力評価実験を行います。

People

メンバー

Faculty Members / 教員

Associate Professor / 准教授

Takao, Yoshinori / 鷹尾 祥典
Google Scholar Citations

Master's Course Students / 博士前期(修士)課程

M2

Inoue, Naoki / 井上 直樹
Emoto, Kazuma / 江本 一磨 ORCID iD icon
Nakamura, Kengo / 中村 研悟

M1

Origuchi, Kazuya / 折口 航哉
Sato, Yosuke / 佐藤 陽亮
Furuya, Ryo / 古家 遼
Yoshikawa, Sora / 吉川 空

Bachelor's Course Students / 学部生

B4

Enomoto Takaaki / 榎本 昴明
Suzuki, Kanta / 鈴木 貫太
Tachibana, Fumiya / 橘 郁哉
Mori, Yuutarou / 森 悠太朗

Blog

研究室ブログ

研究室の日常を綴っています。
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Publications

研究業績

Journals / 学術論文

  1. Kazunori Takahashi, Takeharu Sugawara, Hikaru Akahoshi, Yoshinori Takao, and Akira Ando, "Development of a momentum vector measurement instrument in steady-state plasmas," AIP Advances, Vol. 8, No. 10, Oct. 2018, p. 105117 (10pp). doi: 10.1063/1.5050553 <Open access>   pdf  YNU repository 
  2. Takumi Hatsuse, Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Origin of plasma-induced surface roughening and ripple formation during plasma etching: The crucial role of ion reflection," Journal of Applied Physics, Vol. 124, No. 14, Oct. 2018, p. 143301 (14pp). doi: 10.1063/1.5041846 <Featured Article>
  3. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Thrust imparted by a stepped-diameter magnetic nozzle rf plasma thruster," Applied Physics Letters, Vol. 113, No. 3, Jul. 2018, p. 034101 (4pp). doi: 10.1063/1.5041034   pdf  YNU repository 
  4. Kengo Nakamura, Yuichi Nakagawa, Hiroyuki Koizumi, and Yoshinori Takao, "Numerical Analysis of a Miniature Microwave-discharge Ion Thruster Using Water as the Propellant," Transactions of the Japan Society for Aeronautical and Space Sciences, Vol. 61, No. 4, Jul. 2018, pp. 152–159. doi: 10.2322/tjsass.61.152   pdf  YNU repository 
  5. Nobuya Nakazaki, Haruka Matsumoto, Soma Sonobe, Takumi Hatsuse, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Ripple formation on Si surfaces during plasma etching in Cl2," AIP Advances, Vol. 8, No. 5, May 2018, p. 055027 (12pp). doi: 10.1063/1.5017070 <Open access>   pdf  YNU repository 
  6. Kazuma Emoto, Yoshinori Takao, and Hitoshi Kuninaka, "A Preliminary Study on Radiation Shielding Using Martian Magnetic Anomalies," Biological Sciences in Space, Vol. 32, Apr. 2018, pp. 1–5. doi: 10.2187/bss.32.1 <Open access>   pdf  YNU repository 
  7. Kazuki Takase, Kazunori Takahashi, and Yoshinori Takao, "Numerical Investigation of Neutral-Injection Effect on an Electrodeless Plasma Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, No. 2, Mar. 2018, pp. 105–109. doi: 10.2322/tastj.16.105   pdf  YNU repository 
  8. Kazuma Emoto, Toshiyuki Tsuchiya, and Yoshinori Takao, "Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, No. 2, Mar. 2018, pp. 110–115. doi: 10.2322/tastj.16.110   pdf  YNU repository 
  9. Kazuki Takase, Kazunori Takahashi, and Yoshinori Takao, "Effects of neutral distribution and external magnetic field on plasma momentum in electrodeless plasma thrusters," Physics of Plasmas, Vol. 25, No. 2, Feb. 2018, p. 023507 (8pp). doi: 10.1063/1.5015937   pdf  YNU repository 
  10. Masakatsu Nakano, Kengo Nakamura, Yuichi Nakagawa, Daiki Tomita, Yoshinori Takao, and Hiroyuki Koizumi, "Numerical simulation of full-aperture-pair ion optics in a miniature ion thruster," Physics of Plasmas, Vol. 25, No. 1, Jan. 2018, p. 013524 (11pp). doi: 10.1063/1.5008802   pdf  YNU repository 
  11. Kouichi Ono, Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, and Koji Eriguchi, "Surface morphology evolution during plasma etching of silicon: roughening, smoothing and ripple formation," Journal of Physics D: Applied Physics, Vol. 50, No. 41, Sep. 2017, p. 414001 (31pp). doi: 10.1088/1361-6463/aa8523
  12. Kenta Hiramoto, Yuichi Nakagawa, Hiroyuki Koizumi, and Yoshinori Takao, "Effects of E × B drift on electron transport across the magnetic field in a miniature microwave discharge neutralizer," Physics of Plasmas, Vol. 24, No. 6, Jun. 2017, p. 064504 (5pp). doi: 10.1063/1.4989734   pdf  YNU repository 
  13. Kaito Nakagawa, Toshiyuki Tsuchiya, and Yoshinori Takao, "Microfabricated emitter array for an ionic liquid electrospray thruster," Japanese Journal of Applied Physics, Vol. 56, No. 6S1, Jun. 2017, p. 06GN18 (8pp). doi: 10.7567/JJAP.56.06GN18   pdf  YNU repository 
  14. Nobuya Nakazaki, Haruka Matsumoto, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Surface smoothing during plasma etching of Si in Cl2," Applied Physics Letters, Vol. 109, No. 20, Nov. 2016, p. 204101 (5pp). doi: 10.1063/1.4967474   pdf  YNU repository 
  15. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Modifications of plasma density profile and thrust by neutral injection in a helicon plasma thruster," Applied Physics Letters, Vol. 109, No. 19, Nov. 2016, p. 194101 (4pp). doi: 10.1063/1.4967193   pdf  YNU repository 
  16. Kenta Hiramoto and Yoshinori Takao, "Investigation of Ion Beam Extraction Mechanism for Higher Thrust Density of Ion Thrusters," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_57–Pb_62. doi: 10.2322/tastj.14.Pb_57   pdf  YNU repository 
  17. Kaito Nakagawa and Yoshinori Takao, "Optimization of Plasma Production with Impedance Analysis for a Micro RF Ion Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_63–Pb_68. doi: 10.2322/tastj.14.Pb_63   pdf  YNU repository 
  18. Yoshinori Takao, Hiroyuki Koizumi, Yusuke Kasagi, and Kimiya Komurasaki, "Investigation of Electron Extraction from a Microwave Discharge Neutralizer for a Miniature Ion Propulsion System," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_41–Pb_46. doi: 10.2322/tastj.14.Pb_41   pdf  YNU repository 
  19. Yoshinori Takao, Kenta Hiramoto, Yuichi Nakagawa, Yusuke Kasagi, Hiroyuki Koizumi and Kimiya Komurasaki, "Electron extraction mechanisms of a micro-ECR neutralizer," Japanese Journal of Applied Physics, Vol. 55, No. 7S2, Jul. 2016, p. 07LD09 (5pp). doi: 10.7567/JJAP.55.07LD09   pdf  YNU repository 
  20. Kentaro Nishida, Yukimasa Okada, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Evaluation technique for plasma-induced SiOC dielectric damage by capacitance–voltage hysteresis monitoring," Japanese Journal of Applied Physics, Vol. 55, No. 6S2, Jun. 2016, p. 06HB04 (6pp). doi: 10.7567/JJAP.55.06HB04
  21. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Neutral-depletion-induced axially asymmetric density in a helicon source and imparted thrust," Applied Physics Letters, Vol. 108, No. 7, Feb. 2016, p. 074103 (4pp). doi: 10.1063/1.4942469   pdf  YNU repository 
  22. Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Molecular dynamics simulations of Si etching in Cl- and Br-based plasmas: Cl+ and Br+ ion incidence in the presence of Cl and Br neutrals," Journal of Applied Physics, Vol. 118, No. 23, Dec. 2015, p. 233304 (18pp). doi: 10.1063/1.4937449   pdf  YNU repository  , Publisher's Note: J. Appl. Phys. 119, 059901 (2016)
  23. Yoshinori Takao and Kazunori Takahashi, "Numerical validation of axial plasma momentum lost to a lateral wall induced by neutral depletion," Physics of Plasmas, Vol. 22, No. 11, Nov. 2015, p. 113509 (6pp). doi: 10.1063/1.4935903   pdf  YNU repository 
  24. Ikumi Yamada, Yutaro Hirano, Kenkichi Nishimura, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Silicon nanowire growth on Si and SiO2 substrates by rf magnetron sputtering in Ar/H2," Applied Physics Express, Vol. 8, No. 6, Jun. 2015, p. 066201 (4pp). doi: 10.7567/APEX.8.066201 <APEX Spotlights>
  25. Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Two modes of surface roughening during plasma etching of silicon: Role of ionized etch products," Journal of Applied Physics, Vol. 116, No. 22, Dec. 2014, p. 223302 (20pp). doi: 10.1063/1.4903956   pdf  YNU repository 
  26. Yoshinori Takao, Hiroyuki Koizumi, Kimiya Komurasaki, Koji Eriguchi, and Kouichi Ono, "Three-dimensional particle-in-cell simulation of a miniature plasma source for a microwave discharge ion thruster," Plasma Sources Science and Technology, Vol. 23, No. 6, Dec. 2014, p. 064004 (11pp). doi: 10.1088/0963-0252/23/6/064004   pdf  YNU repository   <Invited paper>
  27. Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Molecular dynamics simulations of silicon chloride ion incidence during Si etching in Cl-based plasmas," Japanese Journal of Applied Physics, Vol. 53, No. 5, May 2014, p. 056201 (9pp). doi: 10.7567/JJAP.53.056201 <JJAP Spotlights>
  28. Hirotaka Tsuda, Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Surface roughening and rippling during plasma etching of silicon: Numerical investigations and a comparison with experiments," Journal of Vacuum Science & Technology B, Vol. 32, No. 3, May 2014, 031212 (21pp). doi: 10.1116/1.4874309   pdf  YNU repository 
  29. Yoshinori Takao, Masataka Sakamoto, Koji Eriguchi, and Kouichi Ono, "Investigation of Plasma Characteristics and Ion Beam Extraction for a Micro RF Ion Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 12, No. ists29, Mar. 2014, pp. Pb_13–Pb_18. doi: 10.2322/tastj.12.Pb_13   pdf  YNU repository 
  30. Masao Noma, Koji Eriguchi, Yoshinori Takao, Nobuyuki Terayama, and Kouichi Ono, “Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DB02 (7pp). doi: 10.7567/JJAP.53.03DB02
  31. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Micro-photoreflectance spectroscopy for microscale monitoring of plasma-induced physical damage on Si substrate,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DF01 (4pp). doi: 10.7567/JJAP.53.03DF01
  32. Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Effects of plasma-induced charging damage on random telegraph noise in metal–oxide–semiconductor field-effect transistors with SiO2 and high-k gate dielectrics,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DF02 (7pp). doi: 10.7567/JJAP.53.03DF02
  33. Koji Eriguchi, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Effects of straggling of incident ions on plasma-induced damage creation in "fin"-type field-effect transistors,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DE02 (6pp). doi: 10.7567/JJAP.53.03DE02
  34. Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Effect of capacitive coupling in a miniature inductively coupled plasma source,” Journal of Applied Physics, Vol. 112, No. 9, Nov. 2012, p. 093306 (10pp). doi: 10.1063/1.4764333   pdf  YNU repository   <JAP Research Highlights>
  35. Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence,” Japanese Journal of Applied Physics, Vol. 51, No. 8S1, Aug. 2012, p. 08HC01 (7pp). doi: 10.1143/JJAP.51.08HC01
  36. Koji Eriguchi, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “High-k MOSFET performance degradation by plasma process-induced charging damage,” 2012 IIRW FINAL REPORT, Oct. 2012, pp. 80–84. doi: 10.1109/IIRW.2012.6468925
  37. Koji Eriguchi, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Analytic Model of Threshold Voltage Variation Induced by Plasma Charging Damage in High-k Metal–Oxide–Semiconductor Field-Effect Transistor,” Japanese Journal of Applied Physics, Vol. 50, No. 10S, Oct. 2011, p. 10PG02 (7pp). doi: 10.1143/JJAP.50.10PG02
  38. Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Molecular Dynamics Analysis of the Formation of Surface Roughness during Si Etching in Chlorine-Based Plasmas,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KB02 (5pp). doi: 10.1143/JJAP.50.08KB02
  39. Hirotaka Tsuda, Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in hlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JE06 (6pp). doi: 10.1143/JJAP.50.08JE06
  40. Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono, “Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JC02 (6pp). doi: 10.1143/JJAP.50.08JC02   pdf  YNU repository 
  41. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD03 (7pp). doi: 10.1143/JJAP.50.08KD03
  42. Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Comparative Study of Plasma-Charging Damage in High-k Dielectric and p–n Junction and Their Effects on Off-State Leakage Current of Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD05 (5pp). doi: 10.1143/JJAP.50.08KD05
  43. Koji Eriguchi, Yoshinori Takao, and Kouichi Ono, “Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JE04 (5pp). doi: 10.1143/JJAP.50.08JE04
  44. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar Metal–Oxide–Semiconductor Field-Effect Transistors and the Optimization Methodology,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD04 (6pp). doi: 10.1143/JJAP.50.08KD04
  45. Takeshi Takahashi, Yoshinori Takao, Yugo Ichida, Koji Eriguchi, and Kouichi Ono, “Microwave-excited microplasma thruster with helium and hydrogen propellants,” Physics of Plasmas, Vol. 18, No. 6, Jun. 2011, p. 063505 (12pp). doi: 10.1063/1.3596539   pdf  YNU repository 
  46. Masanaga Fukasawa, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, Koji Eriguchi, Kouichi Ono, Masaki Minami, Fumikatsu Uesawa, and Tetsuya Tatsumi, “Structural and electrical characterization of HBr/O2 plasma damage to Si substrate,” Journal of Vacuum Science & Technology A, Vol. 29, No. 4, Jul. 2011, p. 041301 (7pp). doi: 10.1116/1.3596606   pdf  YNU repository 
  47. Koji Eriguchi, Yoshinori Takao, and Kouichi Ono, “Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices,” Journal of Vacuum Science & Technology A, Vol. 29, No. 4, Jul. 2011, p. 041303 (8pp). doi: 10.1116/1.3598382   pdf  YNU repository 
  48. Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono, “PIC-MCC Simulations of Capacitive RF Discharges for Plasma Etching,” AIP Conference Proceedings, Vol. 1333, No. 1, May 2011, pp. 1051–1056. doi: 10.1063/1.3562784
  49. Yoshinori Takao, Naoki Kusaba, Koji Eriguchi, and Kouichi Ono, “Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source,” Journal of Applied Physics, Vol. 108, No. 9, Nov. 2010, p. 093309 (8pp). doi: 10.1063/1.3506536   pdf  YNU repository 
  50. Hirotaka Tsuda, Masahito Mori, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Atomic-scale cellular model and profile simulation of Si etching: Formation of surface roughness and residue,” Thin Solid Films, Vol. 518, No. 13, Apr. 2010, pp. 3475–3480. doi: 10.1016/j.tsf.2009.11.043
  51. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Modeling of ion-bombardment damage on Si surfaces for in-line analysis,” Thin Solid Films, Vol. 518, No. 13, Apr. 2010, pp. 3481–3486. doi: 10.1016/j.tsf.2009.11.044
  52. Hirotaka Tsuda, Masahito Mori, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Atomic-Scale Cellular Model and Profile Simulation of Si Etching: Analysis of Profile Anomalies and Microscopic Uniformity,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JE01 (4pp). doi: 10.1143/JJAP.49.08JE01
  53. Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono, “Optical and Electrical Characterization of Hydrogen-Plasma-Damaged Silicon Surface Structures and Its Impact on In-line Monitoring,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JD02 (6pp). doi: 10.1143/JJAP.49.08JD02
  54. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Model for Bias Frequency Effects on Plasma-Damaged Layer Formation in Si Substrates,” Japanese Journal of Applied Physics, Vol. 49, No. 5R, May 2010, p. 056203 (11pp). doi: 10.1143/JJAP.49.056203 <JJAP Spotlights>
  55. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Threshold Voltage Instability Induced by Plasma Process Damage in Advanced Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JC02 (5pp). doi: 10.1143/JJAP.49.08JC02
  56. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 49, No. 4S, Apr. 2010, p. 04DA18 (8pp). doi: 10.1143/JJAP.49.04DA18
  57. Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Numerical and experimental study of microwave-excited microplasma and micronozzle flow for a microplasma thruster,” Physics of Plasmas, Vol. 16, No. 8, Aug. 2009, p. 083505 (14pp). doi: 10.1063/1.3205889   pdf  YNU repository 
  58. Takeshi Takahashi, Yugo Ichida, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Numerical Simulation of a Microwave-Excited Microplasma Thruster,” Transactions of the Japan Society for Aeronautical and Space Sciences, Space Technology Japan, Vol. 7, No. ists26, Dec. 2009, p. Pb_135–Pb_140. doi: 10.2322/tstj.7.Pb_135
  59. Hiroshi Fukumoto, Isao Fujikake, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Plasma chemical behaviour of reactants and reaction products during inductively coupled CF4 plasma etching of SiO2,” Plasma Sources Science and Technology, Vol. 18, No. 4, Nov. 2009, p. 045027 (17pp). doi: 10.1088/0963-0252/18/4/045027
  60. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Plasma-Induced Defect-Site Generation in Si Substrate and Its Impact on Performance Degradation in Scaled MOSFETs,” IEEE Electron Device Letters, Vol. 30, No. 12, Dec. 2009, pp. 1275–1277. doi: 10.1109/LED.2009.2033726
  61. Yoshinori Takao, Takeshi Takahashi, Koji Eriguchi, and Kouichi Ono, “Microplasma thruster for ultra-small satellites: Plasma chemical and aerodynamical aspects,” Pure and Applied Chemistry, Vol. 80, No. 9, Sep. 2008, pp. 2013–2023. doi: 10.1351/pac200880092013   pdf  YNU repository 
  62. Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Microwave-excited microplasma thruster: a numerical and experimental study of the plasma generation and micronozzle flow,” Journal of Physics D: Applied Physics, Vol. 41, No. 19, Oct. 2008, p. 194005 (6pp). doi: 10.1088/0022-3727/41/19/194005
  63. Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “A miniature electrothermal thruster using microwave-excited microplasmas: Thrust measurement and its comparison with numerical analysis,” Journal of Applied Physics, Vol. 101, No. 12, Jun. 2007, p. 123307 (10pp). doi: 10.1063/1.2749336   pdf  YNU repository 
  64. Yoshinori Takao, Kouichi Ono, Kazuo Takahashi, and Yuichi Setsuhara, “Microwave-sustained miniature plasmas for an ultra small thruster,” Thin Solid Films, Vol. 506–507, May 2006, pp. 592–596. doi: 10.1016/j.tsf.2005.08.066   pdf  YNU repository 
  65. Yoshinori Takao and Kouichi Ono, “A miniature electrothermal thruster using microwave-excited plasmas: a numerical design consideration,” Plasma Sources Science and Technology, Vol. 15, No. 2, May 2006, pp. 211–227. doi: 10.1088/0963-0252/15/2/006
  66. Yoshinori Takao, Kouichi Ono, Kazuo Takahashi, and Koji Eriguchi, “Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster,” Japanese Journal of Applied Physics, Vol. 45, No. 10B, Oct. 2006, pp. 8235–8240. doi: 10.1143/JJAP.45.8235
  67. 鷹尾祥典, 斧高一, “マイクロプラズマスラスターの研究開発,” 高温学会誌, Vol. 31, No. 5, Sep. 2005, pp. 283–290. doi: 10.7791/jhts.31.283

Articles / 解説等

  1. [特集] 鷹尾祥典, 土屋智由, 長尾昌善, 村上勝久, “超小型高推力密度エレクトロスプレースラスタの研究開発,” 日本航空宇宙学会誌, Vol. 67, No. 1, Jan. 2019, pp. 5–11. doi: 10.14822/kjsass.67.1_5
  2. [小特集] 斧高一, 中崎暢也, 津田博隆, 鷹尾祥典, 江利口浩二, “プラズマエッチングにおけるナノスケール表面形状揺らぎ,” プラズマ・核融合学会誌, Vol. 90, No. 7, Jul. 2014, pp. 398–404. http://www.jspf.or.jp/Journal/PDF_JSPF/jspf2014_07/jspf2014_07-398.pdf
  3. [研究紹介] 斧高一, 津田博隆, 中崎暢也, 鷹尾祥典, 江利口浩二, “プラズマナノ加工における表面ラフネスとリップル形成機構,” 表面科学, Vol. 34, No. 10, Oct. 2013, pp. 528–534. doi: 10.1380/jsssj.34.528
  4. [最近の展望] 斧高一, 鷹尾祥典, “マイクロプラズマスラスター,” 応用物理, Vol. 76, No. 4, Apr. 2007, pp. 0394–0398. http://www.jsap.or.jp/ap/2007/04/ob760394.xml

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