Publications

Journals / 学術論文

  1. Takaaki Enomoto, Shehan M. Parmar, Ryohei Yamada, Richard E. Wirz, and Yoshinori Takao, "Molecular Dynamics Simulations of Ion Extraction from Nanodroplets for Ionic Liquid Electrospray Thrusters," Journal of Electric Propulsion, Vol. 1, Sep. 2022, p. 13 (21pp). doi: 10.1007/s44205-022-00010-1 <Open access>   pdf  YNU repository 
  2. Naoyuki Matsumoto, Yoshinori Takao, Masayoshi Nagao, and Katsuhisa Murakami, "Oxidation Resistance Improvement of Graphene-Oxide-Semiconductor Planar-Type Electron Sources Using h-BN as an Oxygen-Resistant, Electron-Transmissive Coating," ACS Omega, Vol. 7, No. 37, Sep. 2022, pp. 33004–33009. doi: 10.1021/acsomega.2c02709 <Open access>   pdf  YNU repository 
  3. Takahito Motoki, Daigo Takasaki, Hiroyuki Koizumi, Yasuho Ataka, Kimiya Komurasaki, Yoshinori Takao, "Experimental study on the performance characteristics of a miniature microwave discharge cathode," Acta Astronautica, Vol. 196, Jul. 2022, pp. 231–237. doi: 10.1016/j.actaastro.2022.04.015
  4. Kazuma Emoto, Kazunori Takahashi, and Yoshinori Takao, "Vector Resolved Energy Fluxes and Collisional Energy Losses in Magnetic Nozzle Radiofrequency Plasma Thrusters," Frontiers in Physics, Vol. 9, Dec. 2021, p. 779204 (13pp). doi: 10.3389/fphy.2021.779204 <Open access>   pdf  YNU repository 
  5. Kazuma Emoto, Kazunori Takahashi, and Yoshinori Takao, "Axial momentum gains of ions and electrons in magnetic nozzle acceleration," Plasma Sources Science and Technology, Vol. 30, No. 11, Nov. 2021, p. 115016 (11pp). doi: 10.1088/1361-6595/ac33ee   pdf  YNU repository (available on Nov. 25, 2022) 
  6. Kazuma Emoto, Kazunori Takahashi, and Yoshinori Takao, "Numerical investigation of internal plasma currents in a magnetic nozzle," Physics of Plasmas, Vol. 28, No. 9, Sep. 2021, p. 093506 (11pp). doi: 10.1063/5.0053336   pdf  YNU repository 
  7. Kanta Suzuki, Masayoshi Nagao, Yongxun Liu, Katsuhisa Murakami, Sommawan Khumpuang, Shiro Hara, and Yoshinori Takao, "Fabrication of nano-capillary emitter arrays for ionic liquid electrospray thrusters," Japanese Journal of Applied Physics, Vol. 60, No. SC, Jun. 2021, p. SCCF07 (6pp). doi: 10.35848/1347-4065/abf2d5   pdf  YNU repository 
  8. Fumiya Tachibana, Toshiyuki Tsuchiya, and Yoshinori Takao, "Uniform needle-emitter arrays for ionic liquid electrospray thrusters with precise thrust control," Japanese Journal of Applied Physics, Vol. 60, No. SC, Jun. 2021, p. SCCL06 (9pp). doi: 10.35848/1347-4065/abe997   pdf  YNU repository 
  9. Masakatsu Nakano, Kengo Nakamura, Yuichi Nakagawa, Yoshinori Takao, and Hiroyuki Koizumi, "Design of High Efficiency Grid System for Water Propellant Miniature Ion Thrusters," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 18, No. 6, Nov. 2020, pp. 412–416. doi: 10.2322/tastj.18.412
  10. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Increased Thrust-to-Power Ratio of a Stepped-Diameter Helicon Plasma Thruster with Krypton Propellant," Journal of Propulsion and Power, Vol. 36, No. 6, Nov. 2020, pp. 961–965. doi: 10.2514/1.B37940
  11. Ryo Furuya, Yoshinori Takao, Masayoshi Nagao, and Katsuhisa Murakami, "Low-power-consumption, high-current-density, and propellantless cathode using graphene-oxide-semiconductor structure array," Acta Astronautica, Vol. 174, Sep. 2020, pp. 48–54. doi: 10.1016/j.actaastro.2020.04.014   pdf  YNU repository 
  12. Kazunori Takahashi, Christine Charles, Rod W. Boswell, Yoshinori Takao, Amnon Fruchtman, Jaume Navarro-Cavallé, and Mario Merino, "Commentary: On helicon thrusters: Will they ever fly?," Frontiers in Physics, Vol. 8, Aug. 2020, p. 277 (3pp). doi: 10.3389/fphy.2020.00277 <Open access>
  13. Katsuhisa Murakami, Manabu Adachi, Joji Miyaji, Ryo Furuya, Masayoshi Nagao, Yoichi Yamada, Yoichiro Neo, Yoshinori Takao, Masahiro Sasaki, and Hidenori Mimura, "Mechanism of Highly Efficient Electron Emission from a Graphene/Oxide/Semiconductor Structure," ACS Applied Electronic Materials, Vol. 2, No. 7, Jul. 2020, pp. 2265–2273. doi: 10.1021/acsaelm.0c00449
  14. Yosuke Sato, Hiroyuki Koizumi, Masakatsu Nakano, and Yoshinori Takao, "Electron loss mechanisms in a miniature microwave discharge water neutralizer," Physics of Plasmas, Vol. 27, No. 6, Jun. 2020, p. 063505 (8pp). doi: 10.1063/5.0002336   pdf  YNU repository 
  15. Yosuke Sato, Hiroyuki Koizumi, Masakatsu Nakano, and Yoshinori Takao, "Electron extraction enhancement via the magnetic field in a miniature microwave discharge neutralizer," Journal of Applied Physics, Vol. 126, No. 24, Dec. 2019, p. 243302 (12pp). doi: 10.1063/1.5127805   pdf  YNU repository 
  16. Hiroyuki Koizumi, Jun Asakawa, Yuichi Nakagawa, Keita Nishii, Yoshinori Takao, Masakatsu Nakano, and Ryu Funase, "Assessment of Micropropulsion System Unifying Water Ion Thrusters and Water Resistojet Thrusters," Journal of Spacecraft and Rockets, Vol. 56, No. 5, Sep.-Oct. 2019, pp. 1400–1408. doi: 10.2514/1.A34407
  17. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Low-magnetic-field enhancement of thrust imparted by a stepped-diameter and downstream-gas-injected rf plasma thruster," Plasma Sources Science and Technology, Vol. 28, No. 8, Aug. 2019, p. 085014 (9pp). doi: 10.1088/1361-6595/ab3100
  18. Naoki Inoue, Masayoshi Nagao, Katsuhisa Murakami, Sommawan Khumpuang, Shiro Hara, and Yoshinori Takao, "Fabrication of a high-density emitter array for electrospray thrusters using field emitter array process," Japanese Journal of Applied Physics, Vol. 58, No. SE, Jun. 2019, p. SEEG04 (7pp). doi: 10.7567/1347-4065/ab0fee   pdf  YNU repository 
  19. Katsuhisa Murakami, Joji Miyaji, Ryo Furuya, Manabu Adachi, Masayoshi Nagao, Yoichiro Neo, Yoshinori Takao, Yoichi Yamada, Masahiro Sasaki, and Hidenori Mimura, "High-performance planar-type electron source based on a graphene-oxide-semiconductor structure," Applied Physics Letters, Vol. 114, No. 21, May 2019, p. 213501 (5pp). doi: 10.1063/1.5091585   pdf  YNU repository 
  20. Kengo Nakamura, Hiroyuki Koizumi, Masakatsu Nakano, and Yoshinori Takao, "Effects of negative ions on discharge characteristics of water plasma source for a miniature microwave discharge ion thruster," Physics of Plasmas, Vol. 26, No. 4, Apr. 2019, p. 043508 (10pp). doi: 10.1063/1.5092754   pdf  YNU repository 
  21. Masakatsu Nakano, Kengo Nakamura, Yuki Naito, Yuichi Nakagawa, Yoshinori Takao, and Hiroyuki Koizumi, "Computational design of a high-efficiency accelerator grid for a miniature ion thruster by full-aperture ion optics simulations," AIP Advances, Vol. 9, No. 3, Mar. 2019, p. 035343 (10pp). doi: 10.1063/1.5090413 <Open access>   pdf  YNU repository 
  22. Takeshi Takahashi, Daisuke Mori, Tetsuo Kawanabe, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Microplasma thruster powered by X-band microwaves," Journal of Applied Physics, Vol. 125, No. 8, Feb. 2019, p. 083301 (21pp). doi: 10.1063/1.5054790   pdf  YNU repository 
  23. Kazunori Takahashi, Takeharu Sugawara, Hikaru Akahoshi, Yoshinori Takao, and Akira Ando, "Development of a momentum vector measurement instrument in steady-state plasmas," AIP Advances, Vol. 8, No. 10, Oct. 2018, p. 105117 (10pp). doi: 10.1063/1.5050553 <Open access>   pdf  YNU repository 
  24. Takumi Hatsuse, Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Origin of plasma-induced surface roughening and ripple formation during plasma etching: The crucial role of ion reflection," Journal of Applied Physics, Vol. 124, No. 14, Oct. 2018, p. 143301 (14pp). doi: 10.1063/1.5041846 <Featured Article>
  25. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Thrust imparted by a stepped-diameter magnetic nozzle rf plasma thruster," Applied Physics Letters, Vol. 113, No. 3, Jul. 2018, p. 034101 (4pp). doi: 10.1063/1.5041034   pdf  YNU repository 
  26. Kengo Nakamura, Yuichi Nakagawa, Hiroyuki Koizumi, and Yoshinori Takao, "Numerical Analysis of a Miniature Microwave-discharge Ion Thruster Using Water as the Propellant," Transactions of the Japan Society for Aeronautical and Space Sciences, Vol. 61, No. 4, Jul. 2018, pp. 152–159. doi: 10.2322/tjsass.61.152   pdf  YNU repository 
  27. Nobuya Nakazaki, Haruka Matsumoto, Soma Sonobe, Takumi Hatsuse, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Ripple formation on Si surfaces during plasma etching in Cl2," AIP Advances, Vol. 8, No. 5, May 2018, p. 055027 (12pp). doi: 10.1063/1.5017070 <Open access>   pdf  YNU repository 
  28. Kazuma Emoto, Yoshinori Takao, and Hitoshi Kuninaka, "A Preliminary Study on Radiation Shielding Using Martian Magnetic Anomalies," Biological Sciences in Space, Vol. 32, Apr. 2018, pp. 1–5. doi: 10.2187/bss.32.1 <Open access>   pdf  YNU repository 
  29. Kazuki Takase, Kazunori Takahashi, and Yoshinori Takao, "Numerical Investigation of Neutral-Injection Effect on an Electrodeless Plasma Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, No. 2, Mar. 2018, pp. 105–109. doi: 10.2322/tastj.16.105   pdf  YNU repository 
  30. Kazuma Emoto, Toshiyuki Tsuchiya, and Yoshinori Takao, "Numerical Investigation of Steady and Transient Ion Beam Extraction Mechanisms for Electrospray Thrusters," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 16, No. 2, Mar. 2018, pp. 110–115. doi: 10.2322/tastj.16.110   pdf  YNU repository 
  31. Kazuki Takase, Kazunori Takahashi, and Yoshinori Takao, "Effects of neutral distribution and external magnetic field on plasma momentum in electrodeless plasma thrusters," Physics of Plasmas, Vol. 25, No. 2, Feb. 2018, p. 023507 (8pp). doi: 10.1063/1.5015937   pdf  YNU repository 
  32. Masakatsu Nakano, Kengo Nakamura, Yuichi Nakagawa, Daiki Tomita, Yoshinori Takao, and Hiroyuki Koizumi, "Numerical simulation of full-aperture-pair ion optics in a miniature ion thruster," Physics of Plasmas, Vol. 25, No. 1, Jan. 2018, p. 013524 (11pp). doi: 10.1063/1.5008802   pdf  YNU repository 
  33. Kouichi Ono, Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, and Koji Eriguchi, "Surface morphology evolution during plasma etching of silicon: roughening, smoothing and ripple formation," Journal of Physics D: Applied Physics, Vol. 50, No. 41, Sep. 2017, p. 414001 (31pp). doi: 10.1088/1361-6463/aa8523
  34. Kenta Hiramoto, Yuichi Nakagawa, Hiroyuki Koizumi, and Yoshinori Takao, "Effects of E × B drift on electron transport across the magnetic field in a miniature microwave discharge neutralizer," Physics of Plasmas, Vol. 24, No. 6, Jun. 2017, p. 064504 (5pp). doi: 10.1063/1.4989734   pdf  YNU repository 
  35. Kaito Nakagawa, Toshiyuki Tsuchiya, and Yoshinori Takao, "Microfabricated emitter array for an ionic liquid electrospray thruster," Japanese Journal of Applied Physics, Vol. 56, No. 6S1, Jun. 2017, p. 06GN18 (8pp). doi: 10.7567/JJAP.56.06GN18   pdf  YNU repository 
  36. Nobuya Nakazaki, Haruka Matsumoto, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Surface smoothing during plasma etching of Si in Cl2," Applied Physics Letters, Vol. 109, No. 20, Nov. 2016, p. 204101 (5pp). doi: 10.1063/1.4967474   pdf  YNU repository 
  37. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Modifications of plasma density profile and thrust by neutral injection in a helicon plasma thruster," Applied Physics Letters, Vol. 109, No. 19, Nov. 2016, p. 194101 (4pp). doi: 10.1063/1.4967193   pdf  YNU repository 
  38. Kenta Hiramoto and Yoshinori Takao, "Investigation of Ion Beam Extraction Mechanism for Higher Thrust Density of Ion Thrusters," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_57–Pb_62. doi: 10.2322/tastj.14.Pb_57   pdf  YNU repository 
  39. Kaito Nakagawa and Yoshinori Takao, "Optimization of Plasma Production with Impedance Analysis for a Micro RF Ion Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_63–Pb_68. doi: 10.2322/tastj.14.Pb_63   pdf  YNU repository 
  40. Yoshinori Takao, Hiroyuki Koizumi, Yusuke Kasagi, and Kimiya Komurasaki, "Investigation of Electron Extraction from a Microwave Discharge Neutralizer for a Miniature Ion Propulsion System," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 14, No. ists30, Sep. 2016, pp. Pb_41–Pb_46. doi: 10.2322/tastj.14.Pb_41   pdf  YNU repository 
  41. Yoshinori Takao, Kenta Hiramoto, Yuichi Nakagawa, Yusuke Kasagi, Hiroyuki Koizumi and Kimiya Komurasaki, "Electron extraction mechanisms of a micro-ECR neutralizer," Japanese Journal of Applied Physics, Vol. 55, No. 7S2, Jul. 2016, p. 07LD09 (5pp). doi: 10.7567/JJAP.55.07LD09   pdf  YNU repository 
  42. Kentaro Nishida, Yukimasa Okada, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Evaluation technique for plasma-induced SiOC dielectric damage by capacitance–voltage hysteresis monitoring," Japanese Journal of Applied Physics, Vol. 55, No. 6S2, Jun. 2016, p. 06HB04 (6pp). doi: 10.7567/JJAP.55.06HB04
  43. Kazunori Takahashi, Yoshinori Takao, and Akira Ando, "Neutral-depletion-induced axially asymmetric density in a helicon source and imparted thrust," Applied Physics Letters, Vol. 108, No. 7, Feb. 2016, p. 074103 (4pp). doi: 10.1063/1.4942469   pdf  YNU repository 
  44. Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Molecular dynamics simulations of Si etching in Cl- and Br-based plasmas: Cl+ and Br+ ion incidence in the presence of Cl and Br neutrals," Journal of Applied Physics, Vol. 118, No. 23, Dec. 2015, p. 233304 (18pp). doi: 10.1063/1.4937449   pdf  YNU repository  , Publisher's Note: J. Appl. Phys. 119, 059901 (2016)
  45. Yoshinori Takao and Kazunori Takahashi, "Numerical validation of axial plasma momentum lost to a lateral wall induced by neutral depletion," Physics of Plasmas, Vol. 22, No. 11, Nov. 2015, p. 113509 (6pp). doi: 10.1063/1.4935903   pdf  YNU repository 
  46. Ikumi Yamada, Yutaro Hirano, Kenkichi Nishimura, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Silicon nanowire growth on Si and SiO2 substrates by rf magnetron sputtering in Ar/H2," Applied Physics Express, Vol. 8, No. 6, Jun. 2015, p. 066201 (4pp). doi: 10.7567/APEX.8.066201 <APEX Spotlights>
  47. Nobuya Nakazaki, Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Two modes of surface roughening during plasma etching of silicon: Role of ionized etch products," Journal of Applied Physics, Vol. 116, No. 22, Dec. 2014, p. 223302 (20pp). doi: 10.1063/1.4903956   pdf  YNU repository 
  48. Yoshinori Takao, Hiroyuki Koizumi, Kimiya Komurasaki, Koji Eriguchi, and Kouichi Ono, "Three-dimensional particle-in-cell simulation of a miniature plasma source for a microwave discharge ion thruster," Plasma Sources Science and Technology, Vol. 23, No. 6, Dec. 2014, p. 064004 (11pp). doi: 10.1088/0963-0252/23/6/064004   pdf  YNU repository   <Invited paper>
  49. Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Molecular dynamics simulations of silicon chloride ion incidence during Si etching in Cl-based plasmas," Japanese Journal of Applied Physics, Vol. 53, No. 5, May 2014, p. 056201 (9pp). doi: 10.7567/JJAP.53.056201 <JJAP Spotlights>
  50. Hirotaka Tsuda, Nobuya Nakazaki, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, "Surface roughening and rippling during plasma etching of silicon: Numerical investigations and a comparison with experiments," Journal of Vacuum Science & Technology B, Vol. 32, No. 3, May 2014, 031212 (21pp). doi: 10.1116/1.4874309   pdf  YNU repository 
  51. Yoshinori Takao, Masataka Sakamoto, Koji Eriguchi, and Kouichi Ono, "Investigation of Plasma Characteristics and Ion Beam Extraction for a Micro RF Ion Thruster," Transactions of the Japan Society for Aeronautical and Space Sciences, Aerospace Technology Japan, Vol. 12, No. ists29, Mar. 2014, pp. Pb_13–Pb_18. doi: 10.2322/tastj.12.Pb_13   pdf  YNU repository 
  52. Masao Noma, Koji Eriguchi, Yoshinori Takao, Nobuyuki Terayama, and Kouichi Ono, “Structural, mechanical, and electrical properties of cubic boron nitride thin films deposited by magnetically enhanced plasma ion plating method,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DB02 (7pp). doi: 10.7567/JJAP.53.03DB02
  53. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Micro-photoreflectance spectroscopy for microscale monitoring of plasma-induced physical damage on Si substrate,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DF01 (4pp). doi: 10.7567/JJAP.53.03DF01
  54. Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Effects of plasma-induced charging damage on random telegraph noise in metal–oxide–semiconductor field-effect transistors with SiO2 and high-k gate dielectrics,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DF02 (7pp). doi: 10.7567/JJAP.53.03DF02
  55. Koji Eriguchi, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Effects of straggling of incident ions on plasma-induced damage creation in "fin"-type field-effect transistors,” Japanese Journal of Applied Physics, Vol. 53, No. 3S2, Mar. 2014, p. 03DE02 (6pp). doi: 10.7567/JJAP.53.03DE02
  56. Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Effect of capacitive coupling in a miniature inductively coupled plasma source,” Journal of Applied Physics, Vol. 112, No. 9, Nov. 2012, p. 093306 (10pp). doi: 10.1063/1.4764333   pdf  YNU repository   <JAP Research Highlights>
  57. Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Modeling and Simulation of Nanoscale Surface Rippling during Plasma Etching of Si under Oblique Ion Incidence,” Japanese Journal of Applied Physics, Vol. 51, No. 8S1, Aug. 2012, p. 08HC01 (7pp). doi: 10.1143/JJAP.51.08HC01
  58. Koji Eriguchi, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “High-k MOSFET performance degradation by plasma process-induced charging damage,” 2012 IIRW FINAL REPORT, Oct. 2012, pp. 80–84. doi: 10.1109/IIRW.2012.6468925
  59. Koji Eriguchi, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Analytic Model of Threshold Voltage Variation Induced by Plasma Charging Damage in High-k Metal–Oxide–Semiconductor Field-Effect Transistor,” Japanese Journal of Applied Physics, Vol. 50, No. 10S, Oct. 2011, p. 10PG02 (7pp). doi: 10.1143/JJAP.50.10PG02
  60. Hirotaka Tsuda, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Molecular Dynamics Analysis of the Formation of Surface Roughness during Si Etching in Chlorine-Based Plasmas,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KB02 (5pp). doi: 10.1143/JJAP.50.08KB02
  61. Hirotaka Tsuda, Hiroki Miyata, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Three-Dimensional Atomic-Scale Cellular Model and Feature Profile Evolution during Si Etching in Chlorine-Based Plasmas: Analysis of Profile Anomalies and Surface Roughness,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JE06 (6pp). doi: 10.1143/JJAP.50.08JE06
  62. Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono, “Particle Simulations of Sheath Dynamics in Low-Pressure Capacitively Coupled Argon Plasma Discharges,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JC02 (6pp). doi: 10.1143/JJAP.50.08JC02   pdf  YNU repository 
  63. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD03 (7pp). doi: 10.1143/JJAP.50.08KD03
  64. Masayuki Kamei, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Comparative Study of Plasma-Charging Damage in High-k Dielectric and p–n Junction and Their Effects on Off-State Leakage Current of Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD05 (5pp). doi: 10.1143/JJAP.50.08KD05
  65. Koji Eriguchi, Yoshinori Takao, and Kouichi Ono, “Model for Effects of RF Bias Frequency and Waveform on Si Damaged-Layer Formation during Plasma Etching,” Japanese Journal of Applied Physics, Vol. 50, No. 8S1, Aug. 2011, p. 08JE04 (5pp). doi: 10.1143/JJAP.50.08JE04
  66. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Trade-Off Relationship between Si Recess and Defect Density Formed by Plasma-Induced Damage in Planar Metal–Oxide–Semiconductor Field-Effect Transistors and the Optimization Methodology,” Japanese Journal of Applied Physics, Vol. 50, No. 8S2, Aug. 2011, p. 08KD04 (6pp). doi: 10.1143/JJAP.50.08KD04
  67. Takeshi Takahashi, Yoshinori Takao, Yugo Ichida, Koji Eriguchi, and Kouichi Ono, “Microwave-excited microplasma thruster with helium and hydrogen propellants,” Physics of Plasmas, Vol. 18, No. 6, Jun. 2011, p. 063505 (12pp). doi: 10.1063/1.3596539   pdf  YNU repository 
  68. Masanaga Fukasawa, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, Koji Eriguchi, Kouichi Ono, Masaki Minami, Fumikatsu Uesawa, and Tetsuya Tatsumi, “Structural and electrical characterization of HBr/O2 plasma damage to Si substrate,” Journal of Vacuum Science & Technology A, Vol. 29, No. 4, Jul. 2011, p. 041301 (7pp). doi: 10.1116/1.3596606   pdf  YNU repository 
  69. Koji Eriguchi, Yoshinori Takao, and Kouichi Ono, “Modeling of plasma-induced damage and its impacts on parameter variations in advanced electronic devices,” Journal of Vacuum Science & Technology A, Vol. 29, No. 4, Jul. 2011, p. 041303 (8pp). doi: 10.1116/1.3598382   pdf  YNU repository 
  70. Yoshinori Takao, Kenji Matsuoka, Koji Eriguchi, and Kouichi Ono, “PIC-MCC Simulations of Capacitive RF Discharges for Plasma Etching,” AIP Conference Proceedings, Vol. 1333, No. 1, May 2011, pp. 1051–1056. doi: 10.1063/1.3562784
  71. Yoshinori Takao, Naoki Kusaba, Koji Eriguchi, and Kouichi Ono, “Two-dimensional particle-in-cell Monte Carlo simulation of a miniature inductively coupled plasma source,” Journal of Applied Physics, Vol. 108, No. 9, Nov. 2010, p. 093309 (8pp). doi: 10.1063/1.3506536   pdf  YNU repository 
  72. Hirotaka Tsuda, Masahito Mori, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Atomic-scale cellular model and profile simulation of Si etching: Formation of surface roughness and residue,” Thin Solid Films, Vol. 518, No. 13, Apr. 2010, pp. 3475–3480. doi: 10.1016/j.tsf.2009.11.043
  73. Asahiko Matsuda, Yoshinori Nakakubo, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Modeling of ion-bombardment damage on Si surfaces for in-line analysis,” Thin Solid Films, Vol. 518, No. 13, Apr. 2010, pp. 3481–3486. doi: 10.1016/j.tsf.2009.11.044
  74. Hirotaka Tsuda, Masahito Mori, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Atomic-Scale Cellular Model and Profile Simulation of Si Etching: Analysis of Profile Anomalies and Microscopic Uniformity,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JE01 (4pp). doi: 10.1143/JJAP.49.08JE01
  75. Yoshinori Nakakubo, Asahiko Matsuda, Masanaga Fukasawa, Yoshinori Takao, Tetsuya Tatsumi, Koji Eriguchi, and Kouichi Ono, “Optical and Electrical Characterization of Hydrogen-Plasma-Damaged Silicon Surface Structures and Its Impact on In-line Monitoring,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JD02 (6pp). doi: 10.1143/JJAP.49.08JD02
  76. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Model for Bias Frequency Effects on Plasma-Damaged Layer Formation in Si Substrates,” Japanese Journal of Applied Physics, Vol. 49, No. 5R, May 2010, p. 056203 (11pp). doi: 10.1143/JJAP.49.056203 <JJAP Spotlights>
  77. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Threshold Voltage Instability Induced by Plasma Process Damage in Advanced Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 49, No. 8S1, Aug. 2010, p. 08JC02 (5pp). doi: 10.1143/JJAP.49.08JC02
  78. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Masayuki Kamei, Yoshinori Takao, and Kouichi Ono, “Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced Metal–Oxide–Semiconductor Field-Effect Transistors,” Japanese Journal of Applied Physics, Vol. 49, No. 4S, Apr. 2010, p. 04DA18 (8pp). doi: 10.1143/JJAP.49.04DA18
  79. Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Numerical and experimental study of microwave-excited microplasma and micronozzle flow for a microplasma thruster,” Physics of Plasmas, Vol. 16, No. 8, Aug. 2009, p. 083505 (14pp). doi: 10.1063/1.3205889   pdf  YNU repository 
  80. Takeshi Takahashi, Yugo Ichida, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Numerical Simulation of a Microwave-Excited Microplasma Thruster,” Transactions of the Japan Society for Aeronautical and Space Sciences, Space Technology Japan, Vol. 7, No. ists26, Dec. 2009, p. Pb_135–Pb_140. doi: 10.2322/tstj.7.Pb_135
  81. Hiroshi Fukumoto, Isao Fujikake, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Plasma chemical behaviour of reactants and reaction products during inductively coupled CF4 plasma etching of SiO2,” Plasma Sources Science and Technology, Vol. 18, No. 4, Nov. 2009, p. 045027 (17pp). doi: 10.1088/0963-0252/18/4/045027
  82. Koji Eriguchi, Yoshinori Nakakubo, Asahiko Matsuda, Yoshinori Takao, and Kouichi Ono, “Plasma-Induced Defect-Site Generation in Si Substrate and Its Impact on Performance Degradation in Scaled MOSFETs,” IEEE Electron Device Letters, Vol. 30, No. 12, Dec. 2009, pp. 1275–1277. doi: 10.1109/LED.2009.2033726
  83. Yoshinori Takao, Takeshi Takahashi, Koji Eriguchi, and Kouichi Ono, “Microplasma thruster for ultra-small satellites: Plasma chemical and aerodynamical aspects,” Pure and Applied Chemistry, Vol. 80, No. 9, Sep. 2008, pp. 2013–2023. doi: 10.1351/pac200880092013   pdf  YNU repository 
  84. Takeshi Takahashi, Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “Microwave-excited microplasma thruster: a numerical and experimental study of the plasma generation and micronozzle flow,” Journal of Physics D: Applied Physics, Vol. 41, No. 19, Oct. 2008, p. 194005 (6pp). doi: 10.1088/0022-3727/41/19/194005
  85. Yoshinori Takao, Koji Eriguchi, and Kouichi Ono, “A miniature electrothermal thruster using microwave-excited microplasmas: Thrust measurement and its comparison with numerical analysis,” Journal of Applied Physics, Vol. 101, No. 12, Jun. 2007, p. 123307 (10pp). doi: 10.1063/1.2749336   pdf  YNU repository 
  86. Yoshinori Takao, Kouichi Ono, Kazuo Takahashi, and Yuichi Setsuhara, “Microwave-sustained miniature plasmas for an ultra small thruster,” Thin Solid Films, Vol. 506–507, May 2006, pp. 592–596. doi: 10.1016/j.tsf.2005.08.066   pdf  YNU repository 
  87. Yoshinori Takao and Kouichi Ono, “A miniature electrothermal thruster using microwave-excited plasmas: a numerical design consideration,” Plasma Sources Science and Technology, Vol. 15, No. 2, May 2006, pp. 211–227. doi: 10.1088/0963-0252/15/2/006
  88. Yoshinori Takao, Kouichi Ono, Kazuo Takahashi, and Koji Eriguchi, “Plasma Diagnostics and Thrust Performance Analysis of a Microwave-Excited Microplasma Thruster,” Japanese Journal of Applied Physics, Vol. 45, No. 10B, Oct. 2006, pp. 8235–8240. doi: 10.1143/JJAP.45.8235
  89. 鷹尾祥典, 斧高一, “マイクロプラズマスラスターの研究開発,” 高温学会誌, Vol. 31, No. 5, Sep. 2005, pp. 283–290. doi: 10.7791/jhts.31.283

Articles / 解説等

  1. [研究紹介] 鷹尾祥典, “次世代宇宙産業を担う超小型衛星に不可欠なマイクロスラスタ,” 応用物理, Vol. 90, No. 5, May 2021, pp. 298–302. doi: 10.11470/oubutsu.90.5_298
  2. [特集] 鷹尾祥典, “イオンエンジン,” 油空圧技術, Vol. 59, No. 9, Sep. 2020, pp. 12–18.
  3. [特集] 鷹尾祥典, 土屋智由, 長尾昌善, 村上勝久, “超小型高推力密度エレクトロスプレースラスタの研究開発,” 日本航空宇宙学会誌, Vol. 67, No. 1, Jan. 2019, pp. 5–11. doi: 10.14822/kjsass.67.1_5
  4. [小特集] 斧高一, 中崎暢也, 津田博隆, 鷹尾祥典, 江利口浩二, “プラズマエッチングにおけるナノスケール表面形状揺らぎ,” プラズマ・核融合学会誌, Vol. 90, No. 7, Jul. 2014, pp. 398–404. jspf2014_07-398
  5. [研究紹介] 斧高一, 津田博隆, 中崎暢也, 鷹尾祥典, 江利口浩二, “プラズマナノ加工における表面ラフネスとリップル形成機構,” 表面科学, Vol. 34, No. 10, Oct. 2013, pp. 528–534. doi: 10.1380/jsssj.34.528
  6. [最近の展望] 斧高一, 鷹尾祥典, “マイクロプラズマスラスター,” 応用物理, Vol. 76, No. 4, Apr. 2007, pp. 0394–0398. doi: 10.11470/oubutsu.76.4_394

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